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Three-Dimensional Observation of Edge-Roughness on Poly-Si/TiN Stacked Gate Using Three-Dimensional STEM
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- Journal:
- Microscopy and Microanalysis / Volume 15 / Issue S2 / July 2009
- Published online by Cambridge University Press:
- 26 July 2009, pp. 634-635
- Print publication:
- July 2009
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- Article
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